Physics20775 marksProcesses of IC production
Describe the following process of IC production: (a) Oxidation, (b) Pattern definition, and (c) Doping
Describe the following process of IC production: (a) Oxidation, (b) Pattern definition, and (c) Doping [5]
--- Oxidation is the process of growing a layer of silicon dioxide (SiO₂) on the surface of the silicon wafer. This is achieved by exposing the silicon wafer to an oxidizing environment (oxygen or steam) at high temperatures (around 900°C to 1200°C). Purpose: - The SiO₂ layer acts as an insulatin...