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Physics20805 marksProcesses of IC production

Describe the following process of IC production: (a) Oxidation and (c) Doping. Explain Photolithography in brief.

Describe the following process of IC production: (a) Oxidation and (c) Doping. Explain Photolithography in brief. [5]

--- Oxidation is one of the key steps in IC fabrication. In this process, the silicon wafer is exposed to an oxidizing environment (oxygen or steam) at high temperatures (around 900°C-1200°C) to grow a thin layer of silicon dioxide (SiO₂) on the surface of the wafer. Purpose of Oxidation: - The S...

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